heliInspect™

H9 / 9M

Industrial white light interferometer (Industrial WLI™)

Precision across large fields of view

The heliInspect™ H9 combines large fields of view with high height resolution. Its robust design, long working distances, and flexible software integration make it the ideal solution for series inspection of large components, in-line, at-line, and off-line.

Precision across large areas

Built for industry

Versatile applications

Easy integration

heliInspect™ H9 / H9M

Many FOVs, two working distances

Flexible lens options allow adaptation to different component sizes and requirements.

heliInspect™ H9/H9M – Specification
Features / Magnification 0.5× 0.8× 1.5×
Field of view [mm × mm] 24.6 × 26.1 15.4 × 16.3 12.3 × 13.1 8.2 × 8.7 6.1 × 6.5 0.26 × 0.2
Optical resolution [μm] – H9 48 30 24 16 12 8
Optical resolution [μm] – H9M 24 15 12 18 6 4(*)
Working distance [mm] – Standard 51 51 51 51 49 49
Working distance [mm] – Long 113 113 113 - 110 -
Numerical aperture – Standard 0.033 0.053 0.067 0.10 0.13 0.15
Numerical aperture – Long 0.033 0.053 0.067 - 0.11 -