The heliInspect™ H8 combines highest resolution with material-independent measurement and GenICam interface for fast integration, in-line, at-line or off-line. Every aspect of the heliInspect™ H8 is tailored to industrial use: precise measurement, robust construction, flexible application and seamless integration.
Flexible lens options allow adaptation to different component sizes and requirements.
| Features / Magnification | 2× | 4× | 8× | 10× | 20× | 50× | 100× |
|---|---|---|---|---|---|---|---|
| Field of view [mm × mm] | 6.5 × 6.1 | 3.3 × 3.1 | 1.6 × 1.5 | 1.3 × 1.2 | 0.65 × 0.61 | 0.26 × 0.25 | 0.13 × 0.12 |
| Lateral resolution [µm] – H8 | 12 | 6 | 3 | 2.4 | 1.2 | 0.48 | 0.24(*) |
| Lateral resolution [µm] – H8M | 6 | 3 | 1.5 | 1.2 | 0.6 | 0.24(*) | 0.12(*) |
| Working distance [mm] – Michelson | 43 | 43 | 12.8 | — | — | — | — |
| Working distance [mm] – Mitutoyo Mirau | — | — | — | 8.0 | 6.0 | 3.6 | 2.0 |
| Working distance [mm] – Nikon Mirau | — | — | — | 7.4 | 4.7 | 3.4 | 2.0 |
| Working distance [mm] – Leica Mirau | — | — | — | 3.6 | 3.6 | 2.5 | — |
| Numerical aperture | 0.10 | 0.14 | 0.2 | 0.3 | 0.4 | 0.5 | 0.7 |
| (*) Pixel resolution | |||||||
Precise measurements without vibration control.
| Standard | Step height | Sigma (1) | Delta (2) | Mode |
|---|---|---|---|---|
| VLSI / NIST | 9.9 nm | 0.3 nm | ok | phase |
| VLSI / NIST | 99.6 nm | 0.4 nm | ok | phase |
| PTB | 1.002 μm | 0.5 nm | ok | COMphiFusion |
| PTB | 5.009 μm | 2.5 nm | ok | COMphiFusion |
| PTB | 20.000 μm | 1.7 nm | ok | COMphiFusion |
| VLSI / NIST | 201.603 μm | 44 nm | ok | envelope |
| PTB | 899.941 μm | 63 nm | ok | envelope |
| (1) Sigma = Repeatability (2) Delta = Absolute height within the target tolerance | ||||
Heliotis AG